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2-2. Process Technology of 2D Material for Soft Device

| Participants

member
member_detail
Name :Jong-Hyun Ahn
Affiliation :Yonsei university
Tel :+82-2-2123-2776
E-mail :ahnj@yonsei.ac.kr
Homepage :http://graphene.yonsei.ac.kr
member
member_detail
Name :Hee-Tae Jung
Affiliation :KAIST
Tel :+82-42-350-3931
E-mail :heetae@kaist.ac.kr
Homepage :http://ooem.kaist.ac.kr
member
member_detail
Name :Sung-Yool Choi
Affiliation :KAIST
Tel :+82-42-350-7427
E-mail :sungyool.choi@kaist.ac.kr
Homepage :http://mndl.kaist.ac.kr

| Research Purpose

In this project, research efforts of our team will focus on the development of soft functional devices, including soft memristive synaptic devices, soft transparent high performance thin film transistors, wearable physiological signal monitor, haptic actuators and nanoscale patterning technologies for soft platform using 2D/low-dimensional soft materials in terms of the realization of array or integrated circuits based on those devices/technologies. In addition, the platforms for soft electronics system will be built by exploring the effective technology for the integration of the developed devices.

| Contents

Topic 1. Development of memristor-based synapse device for low power and intelligent soft processor

- Development of synapse device based on soft memristor with gradual switching
- Optimization of realization of synapse array based on soft memristor
- Improvement of performance/reliability of soft synapse array and development of optimization technique for extreme flexibility


[Optical image of soft memristor array and schematic of synapse device]

Topic 2. Development of transparent and soft TFT array using 2D/low-dimensional materials

- Development of soft TFTs having high mobility by the contact engineering and the control of intrinsic properties of 2D/low dimensional materials
- Development of optimum device structure for fabrication of transparent soft TFT array
- Integration of transparent soft TFT arrays with a pixel, and demos for its operation


[Engineering of materials properties of WS2 by varying its thickness]

Topic 3. Development of wearable, high transparent and flexible device based on 2D materials such as graphene and MoS2

- Development of 2D materials based device fabrication process and stable stress-free transfer process
- Development of heterojunction device based 2D materials and Study on a interfacial properties between 2D materials and barrier modulation
- Development of wearable, high performance, high transparency flexible electronics


[Schematic illustration of transfer process for integrated 2D material based devices]



[Schematic illustration of 2D material based flexile device for detecting bio-signal]

Topic 4. Development of high-performance ionic actuators using graphene-based three-dimensional heteronanostructures

- Graphene-based three-dimensional (3D) hetero-nanostructures using nickelocene catalysts.
- 3D hetero-nanostructures-incorporated conducting polymer electrodes with high electrical and electrochemical properties.
- High-performance ionic actuators based on 3D hetero-nanostructures and their performance evaluations.


[(a) Schematic diagram of 3D hetero-nanostructures and (b) their SEM images]



[(a) Bending actuation performances and (b) blocking forces of 3D hetero-nanostructures-based actuators]

Topic 5. Development of the large-scale, high-precision soft patterning process and device fabrication technology using nanoimprint process

- Development of nanostructure patterning technology for large-scale sub-50 nm resolution using nanoimprint process
- Fabrication of the pattern on the soft substrate using 2-dimensional soft nanomaterial
- The design of soft device structure and the multi-physical analysis


[Ultrafine patterning and soft nano-device fabrication process using nanoimprint method]

| Expected Contribution

- Developing fundamental technologies for realizing low power and intelligent soft processor through development of soft synapse array based on low dimensional ultrathin film-based memristor
- Securing the fundamental technologies for the application to high resolution VR devices equipped with flexible displays by developing high performance soft/transparent TFT arrays based on 2D/low-dimensional soft materials.
- Developing a skin-attachable and multi-functional sensors with the stable performances due to atomically thin 2D materials, and expecting the application of developed technologies to healthcare industries and the prior occupation of core technologies for wearable electronics.
- Securing fundamental technologies for high-performance soft haptic actuators through the development of novel hetero-carbon materials and electrode fabrication techniques
- The process development for the flexible and elastic device fabrication using the patterning of nano-device is the core material/process technology which can be applied to the display, solar cell, and electronic device fabrication, and also this development provides us with the basic technology for the electrical patch type health monitoring system
- Providing SSL pattern transfer technologies on the wafer scale soft substrate such as direct patterning and sacrificial layer assist patterning approaches, which are driving development of soft electronics applications and related industry, and demonstration of large-area flexible displays

| Representative Research Achievement

1. B. C. Jang, H. Seong, S. K. Kim, J. Y. Kim, B. J. Koo, J. Choi, S. Y. Yang, S. G. Im, S.-Y. Choi, ACS Appl. Mater. Interfaces 2016, 8, 12951.
2. H.-C. Kim, H. Kim, J.-U. Lee, H.-B. Lee, D.-H. Choi, J.-H. Lee, W. H. Lee, S. H. Jhang, B. H. Park, H. Cheong, S.-W. Lee, and H.-J. Chung, ACS Nano 2015, 9, 6854.
3. M. Park, Y. J. Park, X. Chen, Y-K. Park, M-S. Kim, J-H. Ahn, Adv. Mater. 2016, 28, 2556.
4. I. K. Oh, J. Kim, M. Kotal, KR 10-2016-0091602 (07-19-2016)
5. W. Jung, D. Kim, M. Lee, S. Kim, J. H. Kim, C. S. Han, Adv. Mater. 2014, 26, 6394.
6. W.-B. Jung, H. S. Jeong, H. ?J. Jeon, Y. H. Kim, J. Y. Hwang, J. ?H. Kim, H. ?T. Jung, Adv. Mater. 2015, 27, 6760.